@conference{Eic2008, Author = {Eichhorn, V. and Fatikow, S. and Dahmen, C. and Edeler, C. and Stolle, C. and Jasper, D.}, Title = {Automated Microfactory inside a Scanning Electron Microscope}, Year = {2008}, Month = {10}, type = {conference} } @COMMENT{Bibtex file generated on }