@article{Voi2008,
Author = {Voigt, F. and Gerbach, R. and Krohs, F.},
Title = {Flexural-torsional resonance mode of a chip cantilever system: Applications to nanomachining},

Year = {2008},
Month = {03},
Edition = {27/2},
Booktitle = {Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures},
type = {article}
}
@COMMENT{Bibtex file generated on }