@inproceedings{Hä2008,Author = {Häusler, Stefan and Poppen, Frank and Hahn, Axel},Title = {Real-Time Quality Estimation to Enable Process Evaluation in Integrated Circuit Development},Year = {2008},Month = {01},Booktitle = {Proceedings of the IEEE International Conference on Engineering Management in Europe},type = {inproceedings}}@COMMENT{Bibtex file generated on }