@inproceedings{Hä2008, Author = {Häusler, Stefan and Poppen, Frank and Hahn, Axel}, Title = {Real-Time Quality Estimation to Enable Process Evaluation in Integrated Circuit Development}, Year = {2008}, Month = {01}, Booktitle = {Proceedings of the IEEE International Conference on Engineering Management in Europe}, type = {inproceedings} } @COMMENT{Bibtex file generated on }