@inproceedings{Fah2002,Author = {Fahlbusch, S. and Shirinov, A. and Fatikow, S.},Title = {AFM-based Micro Force Sensor and Haptic Interface for a Nanohandling Robot},Year = {2002},Pages = {1772-1777},Month = {09},Booktitle = {Proc. of the IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS)},type = {inproceedings}}@COMMENT{Bibtex file generated on }