@inproceedings{Fat2002,Author = {Fatikow, S. and Fahlbusch, S. and Garnica, S. and Hülsen, H. and Kortschack, A. and Shirinov, A. and Sill, A.},Title = {Development of a Versatile Nanohandling Station in a Scanning Electron Microscope},Year = {2002},Pages = {93-96},Month = {09},Booktitle = {Proc. of the 3. Int. Workshop on Microfactories (IWMF)},type = {inproceedings}}@COMMENT{Bibtex file generated on }