@inproceedings{Fat2002,Author = {Fatikow, S. and Fahlbusch, S. and Shirinov, A.},Title = {Flexible Microrobots for Object Handling in SEM Applications},Year = {2002},Pages = {153-168},Month = {05},Booktitle = {Proc. of the 1st Int. Colloquium of the Collaborative Research Centre 562},type = {inproceedings}}@COMMENT{Bibtex file generated on }