@inproceedings{Zen2003,Author = {Zenke, J. and Sill, A. and Fatikow, S. and Michler, J. and BĆ¼ttgenbach, S.},Title = {Mechanical materials characterisation in a SEM},Year = {2003},Pages = {595-600},Month = {10},Booktitle = {Proc of 2nd VDE World Microtechnologies Congress (MICRO.tec 2003)},type = {inproceedings}}@COMMENT{Bibtex file generated on }