@inproceedings{Zen2003,
Author = {Zenke, J. and Sill, A. and Fatikow, S. and Michler, J. and Büttgenbach, S.},
Title = {Mechanical materials characterisation in a SEM},

Year = {2003},
Pages = {595-600},
Month = {10},
Booktitle = {Proc of 2nd VDE World Microtechnologies Congress (MICRO.tec 2003)},
type = {inproceedings}
}
@COMMENT{Bibtex file generated on }