@inproceedings{Wic2005,Author = {Wich, T. and Sievers, T. and Jähnisch, M. and Hülsen, H. and Fatikow, S.},Title = {Nanohandling Automation within a Scanning Electron Microscope},Year = {2005},Pages = {1073-1078},Month = {06},Booktitle = {Proc. of IEEE International Symposium on Industrial Electronics (ISIE'05)},type = {inproceedings}}@COMMENT{Bibtex file generated on }