@inproceedings{Jä2005,Author = {Jähnisch, M. and Hülsen, H. and Sievers, T. and Fatikow, S.},Title = {Control System of a Nanohandling Cell within a Scanning Electron Microscope},Year = {2005},Pages = {964-969},Month = {06},Booktitle = {Proc. of 13th Mediterranean Conference on Control and Automation (MED'05)},type = {inproceedings}}@COMMENT{Bibtex file generated on }