@inproceedings{Jä2005, Author = {Jähnisch, M. and Hülsen, H. and Sievers, T. and Fatikow, S.}, Title = {Control System of a Nanohandling Cell within a Scanning Electron Microscope}, Year = {2005}, Pages = {964-969}, Month = {06}, Booktitle = {Proc. of 13th Mediterranean Conference on Control and Automation (MED'05)}, type = {inproceedings} } @COMMENT{Bibtex file generated on }