@inproceedings{Fat2005, Author = {Fatikow, S. and Wich, T. and Sievers, T. and Hülsen, H.}, Title = {Automatic Nanohandling Station inside an SEM}, Year = {2005}, Pages = {21-22}, Month = {10}, Isbn = {-}, Booktitle = {Topical Meeting of Microfacotories for MEMS and Nanofactories}, type = {inproceedings} } @COMMENT{Bibtex file generated on }