@inproceedings{Wic2005,Author = {Wich, T. and Welker, J. and Meyer, I.},Title = {An automated System for Electron Beam induced Deposition},Year = {2005},Month = {09},Booktitle = {50. Internationales Wissenschaftliches Kolloquium (50. IWK)},type = {inproceedings}}@COMMENT{Bibtex file generated on }