@inproceedings{Kra2006,Author = {Kray, S. and Wich, T. and Fatikow, S.},Title = {Microrobot based testing of nanostructures inside an SEM},Year = {2006},Month = {06},Isbn = {-},Booktitle = {Int. Conference on New Actuators},type = {inproceedings}}@COMMENT{Bibtex file generated on }