@inproceedings{Fat2006,Author = {Fatikow, S. and Wich, T. and Kray, S. and Hülsen, H. and Sievers, T. and Jähnisch, M. and Eichhorn, V.},Title = {Automatic Nanohandling Station inside a Scanning Electron Microscope},Year = {2006},Pages = {17-22},Month = {09},Booktitle = {2nd Int. Conference in Multi-Material Micro Manufacture (4M)},type = {inproceedings}}@COMMENT{Bibtex file generated on }