@inproceedings{Sie2006,
Author = {Sievers, T. and Jähnisch, M. and Schrader, C. and Fatikow, S.},
Title = {Vision feedback in an automatic nanohandling station inside an SEM},

Year = {2006},
Month = {10},
Booktitle = {6th Int. Optomechatronics Conference on Visual/Optical Based Assembly and Packaging, SPIE's Optics East},
Organization = {SPIE},
chapter = {63760B},
type = {inproceedings}
}
@COMMENT{Bibtex file generated on }