@inproceedings{Sie2006,Author = {Sievers, T. and Jähnisch, M. and Schrader, C. and Fatikow, S.},Title = {Vision feedback in an automatic nanohandling station inside an SEM},Year = {2006},Month = {10},Booktitle = {6th Int. Optomechatronics Conference on Visual/Optical Based Assembly and Packaging, SPIE's Optics East},Organization = {SPIE},chapter = {63760B},type = {inproceedings}}@COMMENT{Bibtex file generated on }