@article{O.C2018,
Author = {O.C. Haenssler, S. Fatikow, D. Théron},
Title = {Multimodal imaging technology by integrated scanning electron, force, and microwave microscopy and its application to study microscaled capacitors},

Journal = {J. of Vacuum Science \& Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena},
Year = {2018},
Pages = {9},
Month = {01},
Doi = {10.1116/1.5006161},
type = {article}
}
@COMMENT{Bibtex file generated on }