@conference{Wal2017,
Author = {Waldemar Klauser ; Malte Bartenwerfer ; Sergej Fatikow},
Title = { Multi template matching-based drift compensation for electron beam induced deposition },

Year = {2017},
Pages = {299 - 302 },
Publisher = {IEEE Xplore},
Series = {International Conference on Nanotechnology (IEEE-NANO) },
Booktitle = { Nanotechnology (IEEE-NANO), 2017 IEEE 17th International Conference on},
Organization = {IEEE},
Doi = { 10.1109/NANO.2017.8117258},
type = {conference}
}
@COMMENT{Bibtex file generated on }