@inproceedings{Kla2016,
Author = {Klauser, W. and Bartenwerfer, M. and Elfert, P. and Krauskopf, J. E. and Fatikow, S.},
Title = {Nano-granular Layers for Sensor Applications fabricated by Means of Electron Beam induced Deposition},

Year = {2016},
Pages = {1-4},
Booktitle = {Proc. of Micro-Nano-Integration},
type = {inproceedings}
}
@COMMENT{Bibtex file generated on }