@inproceedings{Kla2016,Author = {Klauser, W. and Bartenwerfer, M. and Elfert, P. and Krauskopf, J. E. and Fatikow, S.},Title = {Nano-granular Layers for Sensor Applications fabricated by Means of Electron Beam induced Deposition},Year = {2016},Pages = {1-4},Booktitle = {Proc. of Micro-Nano-Integration},type = {inproceedings}}@COMMENT{Bibtex file generated on }