@inproceedings{Fat2013,
Author = {Fatikow, Sergej and Eichhorn, Volkmar and Bartenwerfer, Malte and Krohs, Florian},
Title = {Nanorobotic AFM/SEM/FIB system for processing, manipulation and characterization of nanomaterials},

Year = {2013},
Pages = {1-4},
Booktitle = {Emerging Technologies Factory Automation (ETFA), 2013 IEEE 18th Conference on},
Doi = {10.1109/ETFA.2013.6648143},
type = {inproceedings}
}
@COMMENT{Bibtex file generated on }