@inproceedings{Fat2013,Author = {Fatikow, Sergej and Eichhorn, Volkmar and Bartenwerfer, Malte and Krohs, Florian},Title = {Nanorobotic AFM/SEM/FIB system for processing, manipulation and characterization of nanomaterials},Year = {2013},Pages = {1-4},Booktitle = {Emerging Technologies Factory Automation (ETFA), 2013 IEEE 18th Conference on},Doi = {10.1109/ETFA.2013.6648143},type = {inproceedings}}@COMMENT{Bibtex file generated on }