@inproceedings{Tie2013,
Author = {Tiemerding, Tobias and Diederichs, Claas and Zimmermann, Sören and Fatikow, Sergej},
Title = {Closing the Loop: High-Speed Visual Servoing and Control of a commercial Nanostage inside the SEM},

Year = {2013},
Month = {8},
Booktitle = {Proceedings of the 3rd 3M-NANO Conference},
type = {inproceedings}
}
@COMMENT{Bibtex file generated on }