@inproceedings{Tie2013,Author = {Tiemerding, Tobias and Diederichs, Claas and Zimmermann, Sören and Fatikow, Sergej},Title = {Closing the Loop: High-Speed Visual Servoing and Control of a commercial Nanostage inside the SEM},Year = {2013},Month = {8},Booktitle = {Proceedings of the 3rd 3M-NANO Conference},type = {inproceedings}}@COMMENT{Bibtex file generated on }