@inproceedings{Fat2007,Author = {Fatikow, S. and Eichhorn, V. and Krohs, Fl. and Stolle, C. and Hagemann, S.},Title = {Development of an automated microrobot station for nanocharacterization},Year = {2007},Pages = {6589-54},Month = {05},Booktitle = {SPIE Conference - Microtechnologies for the New Millennium},type = {inproceedings}}@COMMENT{Bibtex file generated on }