@incollection{Wich.2010b,
Author = {Wich, T. and Stolle, C. and Mikczinski, M. and Fatikow, S.},
Title = {Approach for the 3D-Alignment in Micro- and Nano-scale Assembly Processes},

Year = {2010},
Volume = {315},
Pages = {167-173},
Month = {01},
Publisher = {Springer Berlin Heidelberg},
Isbn = {978-3-642-11597-4},
Booktitle = {IFIP Advances in Information and Communication Technology},
type = {incollection}
}
@COMMENT{Bibtex file generated on }