@inproceedings{Wich.2010, Author = {Wich, T. and Mikczinski, M. and Fatikow, S.}, Title = {Micro-/Nano-Integration for MEMS based on nano-robotic assembly}, Year = {2010}, Pages = {1095-1102}, Month = {01}, Isbn = {978-3-8007-3273-9}, Booktitle = {ISR/ROBOTIK 2010}, type = {inproceedings} } @COMMENT{Bibtex file generated on }