@inproceedings{Wich.2010,Author = {Wich, T. and Mikczinski, M. and Fatikow, S.},Title = {Micro-/Nano-Integration for MEMS based on nano-robotic assembly},Year = {2010},Pages = {1095-1102},Month = {01},Isbn = {978-3-8007-3273-9},Booktitle = {ISR/ROBOTIK 2010},type = {inproceedings}}@COMMENT{Bibtex file generated on }