@inproceedings{Fat2012,Author = {Fatikow, Sergej and Bartenwerfer, Malte and Eichhorn, Volkmar and Zimmermann, Sören and Krohs, Florian},Title = {Automated Nanofabrication by a Combined Robotic SEM/AFM/FIB system},Year = {2012},Pages = {571-576},Month = {03},Address = {Northwestern University, IL, USA},type = {inproceedings}}@COMMENT{Bibtex file generated on }