@inproceedings{Bartenwerfer2011b,Author = {Bartenwerfer, M. and Fatikow, S. and Tunnell, R. and Mick, U. and Stolle, C. and Diederichs, C. and Jasper, D. and Eichhorn, V.},Title = {Towards Automated AFM-based Nanomanipulation in a Combined Nanorobotic AFM/HRSEM/FIB System},Year = {2011},Pages = {171-176},Month = {01},Address = {Beijing, China},Booktitle = {Proceedings of the IEEE International Conference on Mechatronics and Automation (ICMA'11)},Doi = {10.1109/ICMA.2011.5985651},type = {inproceedings}}@COMMENT{Bibtex file generated on }