@conference{Eic2010, Author = {Eichhorn, V. and Jasper, D. and Dahmen, C. and Fatikow, S.}, Title = {Automatisierte nanorobotische Mikro-Nano-Integration zur Herstellung prototypischer Mikrosysteme mit Nanostrukturen}, Year = {2010}, Pages = {73-78}, Month = {03}, type = {conference} } @COMMENT{Bibtex file generated on }