@conference{Eic2008,Author = {Eichhorn, V. and Fatikow, S. and Dahmen, C. and Edeler, C. and Stolle, C. and Jasper, D.},Title = {Automated Microfactory inside a Scanning Electron Microscope},Year = {2008},Month = {10},type = {conference}}@COMMENT{Bibtex file generated on }