@inproceedings{Fat2007,Author = {Fatikow, S. and Eichhorn, V. and Sill, A.},Title = {Trends in Nanohandling},Year = {2007},Month = {10},Booktitle = {Mikrosystemtechnik Kongress Dresden 2007},type = {inproceedings}}@COMMENT{Bibtex file generated on }