At micro- and nanolevel, manipulation- and assembly procedures require continuous feedback from ongoing processes. Integrated sensors are very helpful but can only deliver incomplete process data. Additionally there is indeterminacy caused by effects such as thermal expansion, backlash or force effect. The researchgroup 'Vision Feedback for Micro- and Nanohandling' works on the extraction of sensor information from image data with the objective of process automation. Several imaging modalities are employed, including CCD-cameras, optical microscopes, scanning electron microscopes and medical imaging devices.