Nanoassembly and -machining
Within the research area nanoassembly and –machining, fabrication processes known from the macroscale are transferred into the micro- and nanoscale. Aimed is the automation of these processes to make them attractive for applications in semiconductor fabrication. This affords an efficient linking between conventional and novel process technologies.
All in all, the workgroup is structured in three topical areas. Within this, the BMBF project Zukünftige Verfahren der Mikro- Nanotechnologie” (ZuNaMi, future methods of micro- nanotechnology) allowed to perform an automated, serial assembly on the nanoscale for the first time. Especially in fields of assembly the “dreaded” effects of the micro- and nanoscale – strong adhesive forces at negligible weight force – emerge. This makes special methods for separation and handling necessary. This is supplemented by the development of joining and separating processes and special sensors for force measurement.
Another field of research is the machining of workpieces in the micro- and nanoscale, whereby particle beam based deposition and etching technologies are used. As an example, this allows retrospective structuring of semiconductor surfaces and the construction of nanoscale sensors, actuators and other functionalized elements. According to this, we develop gas injection systems, which allocate the necessary process gases.
The third field of research, characterization of mechanical, electrical and chemical properties, supplements the previously named with the necessary metrology method on the nanoscale. This allows determining important parameters like hardness, mechanical strength, material composition and electrical conductivity.
In all named topical realms the scanning electron microscope serves as a central tool for displaying the manufacturing processes and also as a trigger for possible chemical and physical reactions on the nanoscale. Thus, a manufacturing process can not only be monitored but also controlled. At the same time, the electron microscope forms an interface to the other realms of the OFFIS technology cluster ANH, since the taken images are the basis for image processing and control engineering.
Thus, in the field of research nanoassembly and –machining, there are many links to the realms of mechanical engineering, physics, chemistry, material sciences and computer sciences. This can also be seen with the cooperation projects with other research institutes and numerous local (Oldenburg and near surroundings), national and international companies.