Automated Nanofabrication by a Combined Robotic SEM/AFM/FIB system

Title of Conference

Proceedings of the 7th International Conference on MicroManufacturing (ICOMM)

Alle Autoren

Fatikow, Sergej; Bartenwerfer, Malte; Eichhorn, Volkmar; Zimmermann, Sören; Krohs, Florian

Year

2012

Title

Mechanical properties of boron nitride nanocones

booktitle

Journal of Applied Physics

Alle Autoren

Tian, Y.; Wei, R.; Eichhorn, V.; Fatikow, S.; Shirinzadeh, B.; Zhang, D.

Year

2012

Title

Nanomaterials Enter the Silicon-Based CMOS Era

booktitle

IEEE Nanotechnology Magazine

Alle Autoren

Fatikow, Sergej; Eichhorn, Volkmar; Bartenwerfer, Malte

Year

2012

Title

Towards High Density Biosensors for Mobile Diagnostics

Title of Conference

IEEE Nanotechnology Material and Devices Conference

Alle Autoren

Weigel-Jech, M.; Haenssler, O.C.; Fatikow, S.

Year

2012

Title

Nanorobotic handling of few-layer graphene membranes using a combined AFM/SEM/FIB setup

Title of Conference

2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

Alle Autoren

Zimmermann, Sören; Fatikow, Sergej

Year

2012

Open Loop Force Control of Stick-Slip Drives

Title of Conference

International Journal on Intelligent Mechatronics and Robots, IJIMR

Alle Autoren

Edeler, C.; Fatikow, S.

Year

2011

Title

Design and Control of a Nanohandling Robot

Title of Conference

13th World Congress in Mechanism and Machine Science

Alle Autoren

Fatikow, S.; Edeler, C.; Diederichs, C.; Meyer, I.; Jasper, D.

Year

2011

Title

Auto-configuration and self-calibration in flexible robot-based micro-/nanohandling cells

Title of Conference

18th IFAC World Congress

Alle Autoren

Fatikow, Sergej; Stolle, Christian; Diederichs, Claas; Jasper, Daniel

Year

2011

Title

Automatisierte Handhabung und Montage von anpassbaren AFM-Messspitzen

booktitle

Proceedings of the 3rd GMM Workshop on Micro-Nano-Integration

Alle Autoren

Bartenwerfer, M. and Eichhorn, V. and Jasper, D. and Fatikow, S.

Year

2011

Title

Automated Handling and Assembly of Customizable AFM-Tips

booktitle

Proccedings of the IEEE International Symposium on Assembly and Manufacturing (ISAM'11)

Alle Autoren

Bartenwerfer, M. and Eichhorn, V. and Jasper, D. and Fatikow, S. and Savenko, A. and Petersen, D.~H. and Malm, B. and Bøggild, P.

Year

2011

Title

Towards Automated AFM-based Nanomanipulation in a Combined Nanorobotic AFM/HRSEM/FIB System

booktitle

Proceedings of the IEEE International Conference on Mechatronics and Automation (ICMA'11)

Alle Autoren

Bartenwerfer, M. and Fatikow, S. and Tunnell, R. and Mick, U. and Stolle, C. and Diederichs, C. and Jasper, D. and Eichhorn, V.

Year

2011

Title

Nanorobotic Assembly and Focused Ion Beam Processing of Nanotube-enhanced AFM Probes

booktitle

Proceedings of the 3M-NANO Conference

Alle Autoren

Fatikow, S. and Bartenwerfer, M. and Eichhorn, V.

Year

2011

Title

Hybrid FIB/SEM/SPM System Used for In-situ Analysis of Milling Process on Metallic Thin Films

booktitle

Proceedings of the 3M-NANO Conference

Alle Autoren

Král, Z. and Urbánek, M. and Mick, U. and Eichhorn, V. and Fatikow, S. and Petrenec, M. and Jiruse, J. and Kolíbalová, E. and Zadrazil, M.

Year

2011

High-speed Nanorobot Control in SEM

Title of Conference

International Conference on Industrial Technology

Alle Autoren

Jasper, D.; Diederichs, C.; Edeler, C.; Fatikow, S.

Year

2010

Title

Development of a novel process chain based on Atomic Force Microscopy scratching for small and medium series production of polymer nano structured components

booktitle

ASME Journal of Manufacturing Science and Engineering

Alle Autoren

Brousseau, E. B.; Krohs, F.; Caillaud, E.; Dimov, S.; Gibaru, O.; Fatikow, S.

Year

2010

Title

Simulation and Measurements of Stick-Slip-Microdrives for Nanorobots

Title of Conference

3rd European Conference on Mechanism Science, EUCOMES2010

Alle Autoren

Edeler, Christoph; Meyer, Ingo; Fatikow, Sergej

Year

2010

Title

Fast and Accurate Pick-and-Place Automation with Nanorobots

Title of Conference

ACTUATOR2010, Bremen

Alle Autoren

Edeler, Christoph; Jasper, Daniel; Diederichs, Claas; Fatikow, Sergej

Year

2010

Title

Magnetic Resonance Imaging of Magnetic Particles for Targeted Drug Delivery

Title of Conference

ASME 2010 First Global Congress on NanoEngineering for Medicine and Biology (NEMB2010)

Alle Autoren

Dahmen, C.; Wortmann, T.; Fatikow, S.

Year

2010

Title

Automatisierte nanorobotische Mikro-Nano-Integration zur Herstellung prototypischer Mikrosysteme mit Nanostrukturen

Title of Conference

2. GMM Workshop Mikro-Nano-Integration, Erfurt, Germany

Alle Autoren

Eichhorn, V.; Jasper, D.; Dahmen, C.; Fatikow, S.

Year

2010

Title

Nanorobotic Strategy for Nondestructive Mechanical Characterization of Carbon Nanotubes

booktitle

Bentham Journal Micro and Nanosystems

Alle Autoren

Eichhorn, V.; Bartenwerfer, M.; Fatikow, S.

Year

2010

Title

Novel Four-Point-Probe Design and Nanorobotic Dual Endeffector Strategy for Electrical Characterization of As-grown SWCNT-Bundles

Title of Conference

IEEE International Conference on Robotics and Automation (ICRA 2010), Anchorage, Alaska, USA

Alle Autoren

Eichhorn, V.; Fatikow, S.; Sardan Sukas, O.; Hansen, T.M.; Bøggild, P.; Occhipinti, L.G.

Year

2010

Title

Combined Nanorobotic AFM/SEM System as Novel Toolbox for Automated Hybrid Analysis and Manipulation of Nanoscale Objects

Title of Conference

IEEE International Conference on Robotics and Automation (ICRA 2010), Anchorage, Alaska, USA

Alle Autoren

Mick, U.; Eichhorn, V.; Wortmann, T.; Diederichs, C.; Fatikow, S.

Year

2010

Title

Automated Nanorobotic Handling of Bio- and Nano-Materials

Title of Conference

6th IEEE Conference on Automation Science and Engineering (CASE 2010), Toronto, Canada. Best Paper Award

Alle Autoren

Fatikow, S.; Eichhorn, V.; Jasper, D.; Weigel-Jech, M.; Niewiera, F.; Krohs, F.

Year

2010

Title

NanoBits: Exchangeable and customizable scanning probe tips as a versatile tool for nanoscale applications

Title of Conference

7th International Workshop on Microfactories (IWMF 2010), Daejeon, Korea

Alle Autoren

Eichhorn, V.; Jasper, D.; Krohs, F.; Bøggild, P.; Fahlbusch, S.; Oliva, M.; Krause, O.; Haschke, H.; Fatikow, S.

Year

2010

Title

Nanohandling Robot Cells

booktitle

Handbook of Nanophysics

Alle Autoren

Fatikow, S.; Wich, T.; Dahmen, C.; Jasper, D.; Stolle, C.; Eichhorn, V.; Hagemann, S.; Weigel-Jech, M.

Year

2010

Title

Hardware-based, Trajectory-Controlled Visual Servoing of Mobile Microrobots

Title of Conference

IFAC Symposium on Mechatronic Systems

Alle Autoren

Jasper, Daniel; Diederichs, Claas; Fatikow, Sergej

Year

2010

Title

Automated Handling of Bio-Nanowires for Nanopackaging

Title of Conference

International Conference on Intelligent Robots and Systems (IROS 2010)

Alle Autoren

S. Fatikow, M. Bartenwerfer, F. Krohs, M. Mikczinski, F. Niewiera, M. Weigel-Jech, P. Saketi, P. Kallio

Year

2010

Title

AFM as a Robot for Automated Nanohandling

Title of Conference

International Conference on Control, Automation and Systems 2010

Alle Autoren

Fatikow, Sergej; Bartenwerfer, Malte; Mick, Uwe; Niewiera, Florian; Weigel-Jech, Michael; Krohs, Florian

Year

2010

Investigation of a new process chain based on atomic force microscopy scratching

Title of Conference

4M/ICOMM 2009 - The Global Conference on Micro Manufacture

Alle Autoren

Brousseau, E.; Krohs, F.; Griffiths, A.; Scholz, S.; Fatikow, S.

Year

2009

Title

Nanobits: customisable scanning probe tips

booktitle

IOP Nanotechnology

Alle Autoren

Rajendra Kumar, R. T.; Hassan, S. U.; Sardan, O.; Eichhorn, V.; Fatikow, S.; Krohs, F.; Bøggild, P.

Year

2009

Title

Towards Automated Nanoassembly With the Atomic Force Microscope: A Versatile Drift Compensation Procedure

booktitle

ASME Journal of Dynamic Systems, Measurement, and Control

Alle Autoren

Krohs, F.; Onal, C.; Sitti, M.; Fatikow, S.

Year

2009

Title

Advanced Atomic Force Microscope based System for Manipulation at the Nanoscale

booktitle

Proceedings of the 9th International IFAC Symposium on Robot Control (SYROCO2009)

Title of Conference

9th IFAC Symposium on Robot Control

Alle Autoren

Krohs, F.; Weigel-Jech, M.; Mick, U.; Isken, M.; Fatikow, S.;

Year

2009

Title

Multisensor Soft Tissue Navigation for the Controlled Guidance in Intra-Cardiac Microsurgery

booktitle

Surgery, Mimimal Invasive Interventions, Endoscopy and Image Guided Therapy

Title of Conference

International Congress on Medical Physics and Biomedical Engineering (WC2009)

Alle Autoren

Brell, M.; Isken, M.; Hein, A.; Dahmen, C.; Tunnell, R.; Wortmann, T.; Sill, A.; Fatikow, S.; Bombien, R.; Lutter, G.; Leester-Schädel, M.; Büttgenbach, S.

Year

2009

Title

A Nanorobotic System for Automated Pick-and-Place Handling and Characterization of CNTs

Title of Conference

International Conference on Robotics and Automation

Alle Autoren

Eichhorn; Fatikow; Wortmann; Stolle; Edeler; Jasper; Sardan; Bøggild; Boetsch; Canales; Clavel

Year

2009

Title

Automated Nanorobotic Systems

Title of Conference

IEEE/ASME International Conference on Advanced Intelligent Mechatronics

Alle Autoren

Jasper, D.; Edeler, C.; Diederichs, C.; Naroska, M.; Stolle, C.; Fatikow, S.

Year

2009

Title

Parasitic Effects on Nanoassembly Processes

Title of Conference

IEEE/RSJ International Conference on Intelligent Robots and Systems

Alle Autoren

Wich, T.; Stolle, C.; Edeler, C.; Fatikow, S.

Year

2009

Title

Micro-nano-integration based on automated serial assembly

Title of Conference

IEEE Conference on Automation Science and Egineering

Alle Autoren

Wich, T.; Edeler, C.; Stolle, C.; Fatikow, S.

Year

2009

Title

Carbon Nanotube Detection by Scanning Electron Microscopy

Title of Conference

Eleventh IAPR Conference on Machine Vision Applications (MVA 2009)

Alle Autoren

Wortmann, T.; Fatikow, S.

Year

2009

Title

Visual Feedback Methods for Nanohandling Automation

booktitle

International Journal of Information Acquisition

Alle Autoren

Fatikow, S.; Dahmen, C.; Wortmann, T.; Tunnell, R.

Year

2009

Title

A Nanorobotic System for Automated Pick-and-Place Handling and Characterization of CNTs

Title of Conference

IEEE International Conference on Robotics and Automation

Alle Autoren

Eichhorn, V.;Fatikow, s.; Wortmann, T.; Stolle, C.; Edeler, C.; Jasper, D.; Sardan, O.; Bøggild, P.; Boetsch, G.; Canales, C.; Clavel, R.

Year

2009

Automated Nano-Assembly in the SEM: Challenges in Setting up a Warehouse

booktitle

Proc. of the 17th IFAC World Congress

Title of Conference

17th IFAC World Congress

Alle Autoren

Wich, T.;Stolle, C; Frick, O.; Fatikow, S.

Year

2008

Title

Development, Control and Evaluation of a Mobile Platform for Microrobots

booktitle

Proc. of the 17th IFAC World Congress

Title of Conference

17th IFAC World Congress

Alle Autoren

Edeler, C.; Jasper, D; Fatikow, S.

Year

2008

Title

Depth-Detection Methods for Microgripper based CNT Manipulation in a Scanning Electron Microscope

Alle Autoren

Eichhorn, V.; Fatikow, S.; Wich, T.; Dahmen, C.; Sievers, T.;Andersen, K.N.; Carlson, K.; Bøggild, P.

Year

2008

Title

Simulation and Experimental Evaluation of Laser-Structured Actuators for a Mobile Microrobot

booktitle

Proc. Of the IEEE International Conference on Robotics and Automation

Title of Conference

IEEE International Conference on Robotics and Automation

Alle Autoren

Edeler, C.; Fatikow, S.

Year

2008

Title

CameraMan: A Multirobot System for Nanohandling in a Scanning Electron Microscope

booktitle

Proc. Of the IEEE International Conference on Robotics and Automation

Title of Conference

IEEE International Conference on Robotics and Automation

Alle Autoren

Fatikow, S; Jasper, D.; Edeler, C.; Dahmen, C.

Year

2008

Title

Automated Nanohandling by Microrobots

booktitle

Automated Nanohandling by Microrobots

Alle Autoren

Fatikow, Sergej

Year

2008

Title

Nanohandling Automation: Trends and Current Developments

Alle Autoren

Fatikow, Sergej; Eichhorn, Volkmar

Year

2008

Title

Electrothermal microgrippers for pick-and-place operations

Alle Autoren

Nordström Andersen, K.; Petersen, D.H.; Carlson, K.; Mølhave, K.; Sardan, Ö.; Horsewell, A.; Eichhorn, V.; Fatikow, S.; Bu, I.; Teo, K.; Milne, W. I.; Bøggild, P.

Year

2008

Title

Multimodal Electrothermal Silicon Microgrippers for Manipulation

Alle Autoren

Andersen, K. N.; Petersen, D. H.; Carlson, K.; Mølhave, K.; Sardan, O.; Horsewell, A.; Eichhorn, V.;Fatikow, S.; Bøggild, P.

Year

2008

Title

Development, Control and Evaluation of a Mobile Platform for Microrobots

Title of Conference

International Federation of Automatic Control

Alle Autoren

Edeler, C.; Jasper, D.; Fatikow, S.

Year

2008

Title

Towards automation in AFM based nanomanipulation and electron beam induced deposition for microstructuring

booktitle

Proceedings of the 4th International Conference on Multi-Material Micro Manufacture

Title of Conference

4th International Conference on Multi-Material Micro Manufacture, 4M 2008

Alle Autoren

Krohs, F.; Luttermann, T.; Stolle, C.; Fatikow, S.; Brousseau, E.; Dimov, S.

Year

2008

Title

Towards Automated Handling on the Nanoscale

Title of Conference

2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2008

Alle Autoren

Fatikow, S.; Wich, T.; Krohs, F.; Dahmen, C.

Year

2008

Title

Automated Microfactory inside a Scanning Electron Microscope

Title of Conference

International Workshop on Microfactories, IWMF

Alle Autoren

Eichhorn, V.;Fatikow, S.;Dahmen, C.;Edeler, C.;Stolle, C.;Jasper, D.

Year

2008

Title

Flexible visual feedback for automated nanohandling inside an SEM

Title of Conference

International Symposium on Optomechatronic Technologies, ISOT

Alle Autoren

Fatikow, S.;Jasper, D.;Edeler, C.;Dahmen, C.

Year

2008

Microrobot-based Nanoindentation of an Epoxy-based Electrically Conductive Adhesive

booktitle

IEEE NANO-Conference

Title of Conference

IEEE NANO-Conference

Alle Autoren

Mircea, J.; Fatikow, S.; Sill, A.

Year

2007

Title

Development of an Automated Desktop Station for EBiD-based Nano-Assembly

booktitle

2nd International Conference on Micro-Manufacturing (ICOMM-2007)

Title of Conference

2nd International Conference on Micro-Manufacturing (ICOMM-2007)

Alle Autoren

Luttermann, T.; Wich, T.; Stolle, C.; Fatikow, S.

Year

2007

Title

Automated Characterization and Manipulation of Biological Cells by a Nanohandling Robot Station

Title of Conference

Nanotech Northern Europe (NTNE)

Alle Autoren

Hagemann, Saskia; Krohs, Florian; Fatikow, Sergej

Year

2007

Title

CameraMan - Robot Cell with Flexible Vision Feedback for Automated Nanohandling inside SEMs

Title of Conference

IEEE Conference on Automation Science and Engineering (CASE 2007)

Alle Autoren

Jasper, D.; Dahmen, C.; Fatikow, S.

Year

2007

Title

CameraMan - Nanohandling Robot Cell inside

Title of Conference

International Syposium on Optomechatronic Technologies (ISOT 2007)

Alle Autoren

Jasper, D.; Fatikow, S.

Year

2007

Title

Automated Cell Characterization by a nanohandling robot station

Title of Conference

IEEE Mediterranean Conference on Control and Automation (MED)

Alle Autoren

Krohs, Florian; Hagemann, Saskia; Fatikow, Sergej

Year

2007

Title

Control system for an AFM based nanomanipulation station

Title of Conference

International Syposium on Optomechatronic Technologies (ISOT 2007)

Alle Autoren

Krohs, F.; Hagemann, S.; Oterob, J.; Puig-Vidal, M.; Fatikow, S.

Year

2007

Title

Trends in Nanohandling

booktitle

Mikrosystemtechnik Kongress Dresden 2007

Title of Conference

Mikrosystemtechnik 2007

Alle Autoren

Fatikow, S.; Eichhorn, V.; Sill, A.

Year

2007

Title

Control System of an Automated Nanohandling Robot Cell

booktitle

22nd IEEE International Symposium on Intelligent Control (ISIC)

Title of Conference

22nd IEEE International Symposium on Intelligent Control (ISIC)

Alle Autoren

Stolle, C.; Fatikow, S.

Year

2007

Title

NanoHand: micro-nano system for automatic handling of nano-objects

booktitle

International Syposium on Optomechatronic Technologies (ISOT 2007)

Title of Conference

International Syposium on Optomechatronic Technologies (ISOT 2007)

Alle Autoren

Fatikow, S; Eichhorn, V.; Sill, A.; Steinecker, A.; Meyer, C.; Occhipinti, L.; Fahlbusch, S.; Utke, I.; Bøggild. P.; Breguet, J.-M.; Kaufmann, R.;Zadrazil, R.; Barth, W.

Year

2007

Title

Nanorobotic Manipulation Setup for Pick-and-Place Handling and Nondestructive Characterization of Carbon Nanotubes

booktitle

IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2007)

Title of Conference

IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2007)

Alle Autoren

Eichhorn, V.; Carlson, K.; Andersen, K. N.;Fatikow, S.; Bøggild, P.

Year

2007

Title

Electrothermal microgrippers for pick and place operations

booktitle

33rd International Conference on Micro- and Nano-Engineering (MNE07)

Title of Conference

33rd International Conference on Micro- and Nano-Engineering (MNE07)

Alle Autoren

Andersen, K. N.; Carlson, K.; Petersen, D. H.; Mølhave, K.; Eichhorn, V.; Fatikow, S.; Bøggild, P.

Year

2007

Title

Depth-Detection Methods for CNT Manipulation and Characterization in a Scanning Electron Microscope

booktitle

IEEE International Conference on Mechatronics and Automation (ICMA)

Title of Conference

IEEE International Conference on Mechatronics and Automation (ICMA)

Alle Autoren

Fatikow, S.; Eichhorn, V.; Wich, T.; Sievers, T.; Hänßler, O.; Norstrøm, K. Andersen

Year

2007

Title

Development of an automated microrobot station for nanocharacterization

booktitle

SPIE Conference - Microtechnologies for the New Millennium

Title of Conference

SPIE Conference - Microtechnologies for the New Millennium

Alle Autoren

Fatikow, S.; Eichhorn, V.; Krohs, Fl.; Stolle, C.; Hagemann, S.

Year

2007

Title

Robotic Nanoassembly

booktitle

IEEE International Conference on Mechatronics and Automation (ICMA)

Title of Conference

IEEE International Conference on Mechatronics and Automation (ICMA)

Alle Autoren

Wang, Z.; Fatikow, S.; Su, Sh.; Yang, M.; Hülsen, H.

Year

2007

Title

A carbon nanofibre scanning probe assembled using an electrothermal microgripper

Alle Autoren

Carlson, K.; Andersen, K.N.; Eichhorn, V.; Petersen, D.H.; Mølhave, K.; Bu, I.Y.Y.; Teo, K.B.K.; Milne, W.I.; Fatikow, S.; Bøggild, P.

Year

2007

Title

3D Vision Feedback for Nanohandling Monitoring in a Scanning Electron Microscope

Alle Autoren

Jähnisch, M.; Fatikow, S.

Year

2007

Title

Automated cell characterization by a nanohandling robot station

Title of Conference

The 15th Mediterranean Conference on Control & Automation, 2007, MED '07

Alle Autoren

Krohs, F., Hagemann, S., Fatikow, S.

Year

2007

Title

Control system for an AFM based nanomanipulation station

booktitle

Proceedings of SPIE, the International Society for Optical Engineering

Title of Conference

Optomechatronic systems control III

Alle Autoren

Krohs, Florian; Hagemann, Saskia; Otero, Jorge; Puig-Vidal, Manel; Fatikow, Sergej

Year

2007

Title

Automated Characterization and Manipulation of Biological Cells by a Nanohandling Robot Station

Title of Conference

Nanotech Northern Europe (NTNE) 2007

Alle Autoren

Hagemann, S.; Krohs, F.; Fatikow, S.

Year

2007

Title

Development of automated microrobot-based nanohandling stations for nanocharacterization

booktitle

Microsystem Technologies

Alle Autoren

Fatikow, S.; Eichhorn, V.; Krohs, F.; Mircea, I.; Stolle, C.; Hagemann, S.

Year

2007

Title

Development of an automated microrobot station for nanocharacterization

Title of Conference

SPIE Conference - Microtechnologies for the New Millennium

Alle Autoren

Fatikow, S.; Eichhorn, V.; Krohs, F.; Mircea, I.; Stolle, C.; Hagemann, S.

Year

2007

Title

Improving AFM microbial cell nanomanipulation by the use of a nanohandling microrobot

Title of Conference

AFM BioMed Conference Barcelona 2007

Alle Autoren

Otero, Jordi; Puig-Vidal, Manel; Hagemann, Saskia, Krohs, Florian; Fatikow, Sergej;

Year

2007

Development of an automatic nanorobot cell for handling of Carbon Nanotubes

booktitle

MICRO & NANO ROBOTICS

Title of Conference

IARP - IEEE/RAS - EURON Joint Workshop

Alle Autoren

Fatikow, S.; Eichhorn, V.; Wich, T.; Hülsen, H.; Hänßler, O.; Sievers, T.

Year

2006

Title

Mikroroboter weisen den Weg

Alle Autoren

Fatikow, S.

Year

2006

Title

Self-Organising Locally Interpolating Map for the control of mobile microrobots

booktitle

Proc. Virtual Int. Conference on Intelligent Production Machines and Systems (IPROMS'06)

Alle Autoren

Hülsen, H.; Fatikow, S.; Pham, D.T.; Wang, Z.

Year

2006

Title

Real-Time Object Tracking for the Robot-Based Nanohandling in a Scanning Electron Microscope

Alle Autoren

Sievers, T., Fatikow, S.

Year

2006

Title

Vision feedback in an automatic nanohandling station inside an SEM

booktitle

6th Int. Optomechatronics Conference on Visual/Optical Based Assembly and Packaging, SPIE's Optics East

Alle Autoren

Sievers, T.; Jähnisch, M.;Schrader, C.; Fatikow, S.

Year

2006

Title

Reference pattern-based 2D measurement with nano resolution

booktitle

6th Int. Optomechatronics Conference on Visual/Optical Based Assembly and Packaging, SPIE's Optics East

Alle Autoren

Wang, Z.; Su, Sh.; Verevkin, Y.K.; Fatikow, S.

Year

2006

Title

AFM probe-based nanohandling robot station for the Characterization of CNTs and biological cells

booktitle

5th Int. Workshop on Microfactories (IWMF)

Alle Autoren

Fatikow, Sergej; Eichhorn, Volkmar; Hagemann, Saskia; Hülsen, Helge

Year

2006

Title

Assembly inside a Scanning Electron Microscope using Electron Beam induced Deposition

booktitle

IEEE Int. Conference on Intelligent Robots and Systems (IROS)

Alle Autoren

Wich, T.; Sievers, T.; Fatikow, S.

Year

2006

Title

Assembly tasks inside an SEM

booktitle

Int. Conference on Robotics: Science and Systems

Alle Autoren

Wich, T.; Fatikow, S.

Year

2006

Title

Development and Control of a Versatile Nanohandling Robot Cell

booktitle

8th International IFAC Symposium on Robot Control (SYROCO)

Alle Autoren

Fatikow, S.; Eichhorn, V.; Schrader, C.; Stolle, C.; Sievers, T.; Jähnisch, M.

Year

2006

Title

Impact of Center of Gravity in Quadrotor Helicopter Controller Design

booktitle

Proc. of Mechatronics 2006

Title of Conference

4th IFAC-Symposium on Mechatronic Systems

Alle Autoren

Kemper, M.; Fatikow, S.

Year

2006

Title

Automatic Nanohandling Station inside a Scanning Electron Microscope

booktitle

2nd Int. Conference in Multi-Material Micro Manufacture (4M)

Alle Autoren

Fatikow, S.; Wich, T.; Kray, S.; Hülsen, H.; Sievers, T.;Jähnisch, M.; Eichhorn, V.

Year

2006

Title

Development of a Nanohandling Robot Station for Nanocharacterization by an AFM Probe

booktitle

IEEE Mediterranean Conference on Control and Automation (MED)

Alle Autoren

Fatikow, S.; Kray, S.; Eichhorn, V.; Tautz, S.

Year

2006

Title

Microrobot based testing of nanostructures inside an SEM

booktitle

Int. Conference on New Actuators

Alle Autoren

Kray, S.; Wich, T.; Fatikow, S.

Year

2006

Title

Microrobot System for Automatic Nanohandling inside a Scanning Electron Microscope

booktitle

IEEE Int. Conference on Robotics and Automation (ICRA)

Alle Autoren

Fatikow, S.; Wich, T.; Hülsen, H.; Sievers, T.; Jähnisch, M.

Year

2006

Robotised Nanomanufacturing: Current Developments and Future Trends

Alle Autoren

Pham, D.T. ; Wang, Z.; Su, S.; Pham, P.T.N.; Yang, M., Fatikow, S.

Year

2005

Title

Automatic Nanohandling Station inside an SEM

booktitle

Topical Meeting of Microfacotories for MEMS and Nanofactories

Alle Autoren

Fatikow, S.; Wich, T.; Sievers, T.; Hülsen, H.

Year

2005

Title

Roboterbasierte Automatisierung der Nanohandhabungsprozesse

Alle Autoren

Fatikow, S.

Year

2005

Title

Microrobot station for automatic cell handling

booktitle

ICGST International Conference on Automation, Robotics and Autonomous Systems (ARAS-05)

Alle Autoren

Sievers, T.; Garnica, S.; Tautz, S.; Trüper, T.; Fatikow, S.

Year

2005

Title

Pose estimation of mobile microrobots in a Scanning electron microscope

booktitle

Proc. of the 2nd International Conference on Informatics in Control, Automation and Robotics (ICINCO)

Alle Autoren

Sievers, T.; Fatikow, S.

Year

2005

Title

Extrapolation with a self-organising locally interpolating map

booktitle

Proc. of the 2nd International Conference on Informatics in Control, Automation and Robotics (ICINCO)

Alle Autoren

Hülsen, Helge; Fatikow, Sergej

Year

2005

Title

Visual Servoing of a Mobile Microrobot inside a Scanning Electron Microscope

booktitle

Proc. of IEEE Int. Conference of Intelligent Robots and Systems (IROS)

Alle Autoren

Sievers, T.; Fatikow, S.

Year

2005

Title

Control System of a Nanohandling Cell within a Scanning Electron Microscope

booktitle

Proc. of 13th Mediterranean Conference on Control and Automation (MED'05)

Alle Autoren

Jähnisch, M.; Hülsen, H.; Sievers, T.; Fatikow, S.

Year

2005

Title

Nanohandling Automation within a Scanning Electron Microscope

booktitle

Proc. of IEEE International Symposium on Industrial Electronics (ISIE'05)

Alle Autoren

Wich, T.; Sievers, T.; Jähnisch, M.; Hülsen, H.; Fatikow, S.

Year

2005

Title

Development of mobile versatile nanohandling microrobots: design, driving principles, haptic control

Alle Autoren

Kortschack, A.; Shirinov, A.; Trüper, T.; Fatikow, S.

Year

2005

Towards fully automated Microhandling

booktitle

Proc. Int. Workshop on Microfactories (IWMF'04)

Alle Autoren

Fatikow, S.; Kortschack, A.; Hülsen, H.; Sievers, T.; Wich, T.

Year

2004

Title

Transporting cells with mobile microrobots

booktitle

IEE Proc.-Nanobiotechnology

Alle Autoren

Trüper, T.; Kortschack, A.; Jähnisch; M.; Hülsen, H.; Fatikow, S.

Year

2004

Title

Development of a mobile nanohandling robot

Alle Autoren

Kortschack, A.; Fatikow, S.

Year

2004

Title

Control System for the automatic Handling of biological Cells with mobile Microrobots

booktitle

Proc. American Control Conference (ACC'04)

Alle Autoren

Hülsen, H.; Trüper, T.; Fatikow, S.

Year

2004

Title

A Navigation System Concept for an Indoor Micro Air Vehicle

booktitle

First European Micro Air Vehicle Conference and Flight Competition

Alle Autoren

Eich, M.; Kemper, M., Fatikow, S.

Year

2004

Title

Versatile Nanohandling Robot Cell in a Scanning Electron Microscope

booktitle

Proc. of 12th Mediterranean Conf. on Control and Automation

Alle Autoren

Fatikow, S.; Kemper; M.; Kortschack, A.; Sievers, T.; Zenke, J.; Shirinov, A.; Hohn, S.

Year

2004

Title

Haptic Interface for a Nanohandling Robot

Alle Autoren

Shirinov, A.; Kamenik, J; Fatikow, S.

Year

2004

Title

Development of a Novel Low-Cost Microindenter

booktitle

9th Int. Conf. on New Actuators

Alle Autoren

Kemper, M.; Zenke, J.; Fatikow, S.

Year

2004

Driving principles of Mobile Microrobots for the Micro- and Nanohandling

booktitle

Proc. of IEEE/RSJ Int. Conference of Intelligent Robots and Systems (IROS)

Alle Autoren

Kortschack, A.; Hänßler, O.; Rass, C.; Fatikow, S.

Year

2003

Title

Mechanical materials characterisation in a SEM

booktitle

Proc of 2nd VDE World Microtechnologies Congress (MICRO.tec 2003)

Alle Autoren

Zenke, J.; Sill, A.; Fatikow, S.; Michler, J.; Büttgenbach, S.

Year

2003

Title

Transporting and Sorting of Cells with Microrobots

booktitle

Proc of 2nd VDE World Microtechnologies Congress (MICRO.tec 2003)

Alle Autoren

Trüper, T.; Kortschack, A.; Jähnisch, M.; Hülsen, H.; Fatikow, S.

Year

2003

Title

Multi-Modal Control Interface for a Microrobot-Based Nanohandling Cell

booktitle

Proc of 2nd VDE World Microtechnologies Congress (MICRO.tec 2003)

Alle Autoren

Garnica, S.; Shirinov, A.; Sievers, T.; Kamenik, J.; John, R.; Hänßler, O.; Fatikow, S.

Year

2003

Title

Stable Teleoperation of Nanobandling Microrobots by Using a Haptic-Based Human-Machine Interface

booktitle

Proc. of 10th Biomedical Science and Technology Symposium

Alle Autoren

Shirinov, A.; Fatikow, S.

Year

2003

Title

Multimodal Control of a Microrobot in an SEM-Based Nanohandling Station

booktitle

Proc. of Int. IEEE Symp. on Intelligent Control

Alle Autoren

Fatikow, S.; Shirinov, A.; Hülsen, H.; Garnica, S.

Year

2003

Title

Fuzzy Logic-based Control Algorithm for a Nanohandling Microrobot

booktitle

Proc. of 5. Int. Workshop on Computer Science and Information Technologies

Alle Autoren

Kalagin, I.; Hülsen, H.; Fatikow, S.

Year

2003

Title

Development of a haptic interface for a nanohandling robot cell

booktitle

Proc. of Eurohaptics

Alle Autoren

Shirinov, A.; Fatikow, S.

Year

2003

Title

A Rotorcraft Micro Air Vehicle for Indoor Applications

booktitle

Proc. of 11th Int. IEEE Conf. on Advanced Robotics

Alle Autoren

Kemper, M.; Merkel, M.; Fatikow, S.

Year

2003

Title

Multimodal control interface of a nanohandling robot in a scanning electron microscope

booktitle

Proc. of Int. Conf. on Human-Computer Interaction

Alle Autoren

Fatikow, S.; Shirinov, A.

Year

2003

Title

Development of a nanohandling robot cell

booktitle

Proc. of the 11th Mediterranean Conference on Control and Automation

Alle Autoren

Fahlbusch, S.; Fatikow, S.; Garnica, S.; Huelsen, Helge; Kortschack, A.

Year

2003

Title

Attitude Control System for a Rotorcraft Micro Air Vehicle for Indoor Applications

booktitle

Proc. of 18. Bristol Int. Conf. on Unmanned Air Vehicle Systems

Alle Autoren

Kemper, M.; Merkel, M.; Fatikow, S.

Year

2003

Title

Versatile Microrobot System for Operating Inside a Scanning Electron Microscope

booktitle

Proc. of the 2nd Int. Symposium on Autonomous Minirobots for Research and Edutainment

Alle Autoren

Fatikow, S.; Kortschack, A.; Fahlbusch, S.; Sill, A.; Trüper, T.

Year

2003

Title

Control System of a Nanohandling Robot inside a Scanning Electron Microscope

booktitle

Proc. of 5. Int. Workshop on Computer Science and Information Technologies

Alle Autoren

Garnica, S.; Hülsen, H.; Kalagin, I.; Fatikow, S.

Year

2003

Title

Development of a Control System for a Microrobot-Based Nanohandling Station

booktitle

Proc. of 7th Int. IFAC Symp. on Robot Control (SYROCO)

Alle Autoren

Garnica, S.; Hulsen, H.; Fatikow, S.

Year

2003

Title

Extended Kohonen Networks for the Pose Control of Microrobots in a Nanohandling Station

booktitle

Proc. of Int. IEEE Symp. on Intelligent Control

Alle Autoren

Hulsen, H.; Garnica, S.; Fatikow, S.

Year

2003

Flexible Microrobots for Object Handling in SEM Applications

booktitle

Proc. of the 1st Int. Colloquium of the Collaborative Research Centre 562

Alle Autoren

Fatikow, S.; Fahlbusch, S.; Shirinov, A.

Year

2002

Title

Smart materials for actuation in microrobotics

booktitle

Proc. of SPIE Int. Symp. on Smart Structures, Devices, and Systems

Alle Autoren

Fatikow, S.; Kortschack, A.

Year

2002

Title

Development of a Versatile Nanohandling Station in a Scanning Electron Microscope

booktitle

Proc. of the 3. Int. Workshop on Microfactories (IWMF)

Alle Autoren

Fatikow, S.; Fahlbusch, S.; Garnica, S.; Hülsen, H.; Kortschack, A.; Shirinov, A.; Sill, A.

Year

2002

Title

AFM-based Micro Force Sensor and Haptic Interface for a Nanohandling Robot

booktitle

Proc. of the IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS)

Alle Autoren

Fahlbusch, S.; Shirinov, A.; Fatikow, S.

Year

2002