Automated Nanofabrication by a Combined Robotic SEM/AFM/FIB system

Title of Conference

Proceedings of the 7th International Conference on MicroManufacturing (ICOMM)

Alle Autoren

Fatikow, Sergej; Bartenwerfer, Malte; Eichhorn, Volkmar; Zimmermann, Sören; Krohs, Florian

Year

2012

Development of a novel process chain based on Atomic Force Microscopy scratching for small and medium series production of polymer nano structured components

booktitle

ASME Journal of Manufacturing Science and Engineering

Alle Autoren

Brousseau, E. B.; Krohs, F.; Caillaud, E.; Dimov, S.; Gibaru, O.; Fatikow, S.

Year

2010

Title

Automated Nanorobotic Handling of Bio- and Nano-Materials

Title of Conference

6th IEEE Conference on Automation Science and Engineering (CASE 2010), Toronto, Canada. Best Paper Award

Alle Autoren

Fatikow, S.; Eichhorn, V.; Jasper, D.; Weigel-Jech, M.; Niewiera, F.; Krohs, F.

Year

2010

Title

NanoBits: Exchangeable and customizable scanning probe tips as a versatile tool for nanoscale applications

Title of Conference

7th International Workshop on Microfactories (IWMF 2010), Daejeon, Korea

Alle Autoren

Eichhorn, V.; Jasper, D.; Krohs, F.; Bøggild, P.; Fahlbusch, S.; Oliva, M.; Krause, O.; Haschke, H.; Fatikow, S.

Year

2010

Title

Automated Handling of Bio-Nanowires for Nanopackaging

Title of Conference

International Conference on Intelligent Robots and Systems (IROS 2010)

Alle Autoren

S. Fatikow, M. Bartenwerfer, F. Krohs, M. Mikczinski, F. Niewiera, M. Weigel-Jech, P. Saketi, P. Kallio

Year

2010

Title

AFM as a Robot for Automated Nanohandling

Title of Conference

International Conference on Control, Automation and Systems 2010

Alle Autoren

Fatikow, Sergej; Bartenwerfer, Malte; Mick, Uwe; Niewiera, Florian; Weigel-Jech, Michael; Krohs, Florian

Year

2010

Investigation of a new process chain based on atomic force microscopy scratching

Title of Conference

4M/ICOMM 2009 - The Global Conference on Micro Manufacture

Alle Autoren

Brousseau, E.; Krohs, F.; Griffiths, A.; Scholz, S.; Fatikow, S.

Year

2009

Title

Nanobits: customisable scanning probe tips

booktitle

IOP Nanotechnology

Alle Autoren

Rajendra Kumar, R. T.; Hassan, S. U.; Sardan, O.; Eichhorn, V.; Fatikow, S.; Krohs, F.; Bøggild, P.

Year

2009

Title

Towards Automated Nanoassembly With the Atomic Force Microscope: A Versatile Drift Compensation Procedure

booktitle

ASME Journal of Dynamic Systems, Measurement, and Control

Alle Autoren

Krohs, F.; Onal, C.; Sitti, M.; Fatikow, S.

Year

2009

Title

Advanced Atomic Force Microscope based System for Manipulation at the Nanoscale

booktitle

Proceedings of the 9th International IFAC Symposium on Robot Control (SYROCO2009)

Title of Conference

9th IFAC Symposium on Robot Control

Alle Autoren

Krohs, F.; Weigel-Jech, M.; Mick, U.; Isken, M.; Fatikow, S.;

Year

2009

Flexural-torsional resonance mode of a chip cantilever system: Applications to nanomachining

booktitle

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Alle Autoren

Voigt, F.; Gerbach, R.; Krohs, F.

Year

2008

Title

Towards automation in AFM based nanomanipulation and electron beam induced deposition for microstructuring

booktitle

Proceedings of the 4th International Conference on Multi-Material Micro Manufacture

Title of Conference

4th International Conference on Multi-Material Micro Manufacture, 4M 2008

Alle Autoren

Krohs, F.; Luttermann, T.; Stolle, C.; Fatikow, S.; Brousseau, E.; Dimov, S.

Year

2008

Title

Towards Automated Handling on the Nanoscale

Title of Conference

2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2008

Alle Autoren

Fatikow, S.; Wich, T.; Krohs, F.; Dahmen, C.

Year

2008

Improving AFM microbial cell nanomanipulation by the use of a nanohandling microrobot

booktitle

AFM BioMed Conference

Title of Conference

AFM BioMed Conference

Alle Autoren

Otero; J.; Puig; M.; Hagemann; S.; Krohs; F.

Year

2007

Title

Automated cell characterization by a nanohandling robot station

Title of Conference

The 15th Mediterranean Conference on Control & Automation, 2007, MED '07

Alle Autoren

Krohs, F., Hagemann, S., Fatikow, S.

Year

2007

Title

Control system for an AFM based nanomanipulation station

booktitle

Proceedings of SPIE, the International Society for Optical Engineering

Title of Conference

Optomechatronic systems control III

Alle Autoren

Krohs, Florian; Hagemann, Saskia; Otero, Jorge; Puig-Vidal, Manel; Fatikow, Sergej

Year

2007

Title

Automated Characterization and Manipulation of Biological Cells by a Nanohandling Robot Station

Title of Conference

Nanotech Northern Europe (NTNE) 2007

Alle Autoren

Hagemann, S.; Krohs, F.; Fatikow, S.

Year

2007

Title

Development of automated microrobot-based nanohandling stations for nanocharacterization

booktitle

Microsystem Technologies

Alle Autoren

Fatikow, S.; Eichhorn, V.; Krohs, F.; Mircea, I.; Stolle, C.; Hagemann, S.

Year

2007

Title

Development of an automated microrobot station for nanocharacterization

Title of Conference

SPIE Conference - Microtechnologies for the New Millennium

Alle Autoren

Fatikow, S.; Eichhorn, V.; Krohs, F.; Mircea, I.; Stolle, C.; Hagemann, S.

Year

2007

Title

Improving AFM microbial cell nanomanipulation by the use of a nanohandling microrobot

Title of Conference

AFM BioMed Conference Barcelona 2007

Alle Autoren

Otero, Jordi; Puig-Vidal, Manel; Hagemann, Saskia, Krohs, Florian; Fatikow, Sergej;

Year

2007